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摘要
申请公布号
JP3639229(B2)
申请公布日期
2005.04.20
申请号
JP20010216446
申请日期
2001.07.17
申请人
发明人
分类号
H01L21/3205;H01L21/304;H01L21/306;H01L21/321;H01L21/768;(IPC1-7):H01L21/320
主分类号
H01L21/3205
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