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发明名称
POLYMERIZABLE COMPOSITION, POLYMER, RESIST, AND LITHOGRAPHY METHODS
摘要
申请公布号
EP1523698(A1)
申请公布日期
2005.04.20
申请号
EP20030787737
申请日期
2003.07.21
申请人
INFINEON TECHNOLOGIES AG
发明人
ELIAN, KLAUS
分类号
C08F30/08;G03F7/039;G03F7/075;(IPC1-7):G03F7/075;C08F230/08
主分类号
C08F30/08
代理机构
代理人
主权项
地址
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