发明名称 Frequency transform phase shifting interferometry
摘要 The invention features methods and systems in which wavelength-tune PSI data is analyzed in the frequency domain to produce spectrally separated frequency peaks each corresponding to a particular pair of surfaces in an interferometric cavity defined by multiple pairs of surfaces. Each frequency peak provides optical path length information about a corresponding pair of surfaces in the cavity. As a result, the interferometric data from such cavities provides simultaneous information about multiple surfaces.
申请公布号 US6882432(B2) 申请公布日期 2005.04.19
申请号 US20010919511 申请日期 2001.07.31
申请人 ZYGO CORPORATION 发明人 DECK LESLIE L.
分类号 G01B9/02;G01B11/06;G01B11/24;(IPC1-7):G01B9/02 主分类号 G01B9/02
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