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发明名称
manufacturing apparatus of semiconductor device
摘要
申请公布号
KR100484327(B1)
申请公布日期
2005.04.19
申请号
KR20010075090
申请日期
2001.11.29
申请人
发明人
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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