发明名称 |
Hybrid magnetic/electrostatic deflector for ion implantation systems |
摘要 |
A magnetic deflector for an ion beam is disclosed and comprises first and second coils. The coils are positioned above and below the beam, respectively, and extend along a width of the beam. Current passes through the coils to generate a magnetic field therebetween that is generally perpendicular to a direction of travel of the beam along substantially the entire width thereof. In another aspect of the invention, a method of deflecting a beam prior to implantation into a workpiece is disclosed. The method includes determining one or more properties associated with the beam and selectively activating one of a magnetic deflection module and an electrostatic deflection module based on the determination.
|
申请公布号 |
US6881966(B2) |
申请公布日期 |
2005.04.19 |
申请号 |
US20030461702 |
申请日期 |
2003.06.13 |
申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
BENVENISTE VICTOR M.;RATHMELL ROBERT D.;HUANG YONGZHANG |
分类号 |
H01J27/18;H01J37/00;H01J37/05;H01J37/147;H01J37/30;H01J37/317;(IPC1-7):H01J37/30 |
主分类号 |
H01J27/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|