发明名称 Reticle transferring support and transferring method thereof
摘要 A reticle transferring support. The reticle transferring support has a supporting basefor containing a reticle, a plurality of braces for supporting the reticle, and a plurality of holders for fixing the position of the reticle. The braces are spheroids composed of soft plastic, and the position of the braces is adjustable so that the reticle will not be arranged. The holders each have an inclined plane so that the position of the reticle will be fixed automatically.
申请公布号 US6882408(B2) 申请公布日期 2005.04.19
申请号 US20030604092 申请日期 2003.06.25
申请人 POWERCHIP SEMICONDUCTOR CORP. 发明人 LIN PO-CHING
分类号 G03F7/20;(IPC1-7):G03B27/42 主分类号 G03F7/20
代理机构 代理人
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