发明名称 Etching in combination with other processing techniques to facilitate alignment of a die in a system and structures formed thereby
摘要 Etching in combination with other processing techniques is used to facilitate alignment of an optical die in an optical system. The optical dies are formed on a wafer level and need to be singulated for use in the optical system. The formation of a precise edge from etching allows more accurate alignment of the optical die in the optical system. The other processing techniques include dicing, sawing, cleaving, breaking and thinning.
申请公布号 US6881600(B2) 申请公布日期 2005.04.19
申请号 US20030628575 申请日期 2003.07.29
申请人 DIGITAL OPTICS CORP 发明人 FELDMAN MICHAEL R.;MORRIS JAMES E.;HAN HONGTAO;CHEN XIANSONG;YANG YINBAO
分类号 G02B6/36;G02B6/42;(IPC1-7):H01L21/00;G01R31/26 主分类号 G02B6/36
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