发明名称 |
Electrothermal self-latching MEMS switch and method |
摘要 |
Electrothermal Self-Latching MEMS Switch and Method. According to one embodiment, a microscale switch having a movable microcomponent is provided and includes a substrate having a stationary contact. The switch can also include a structural layer having a movable contact positioned for contacting the stationary contact when the structural layer moves toward the substrate. An electrothermal latch attached to the structural layer and having electrical communication with the movable contact to provide current flow between the electrothermal latch and the stationary contact when the movable contact contacts the stationary contact for maintaining the movable contact in contact with the stationary contact.
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申请公布号 |
US6882264(B2) |
申请公布日期 |
2005.04.19 |
申请号 |
US20020290807 |
申请日期 |
2002.11.08 |
申请人 |
WISPRY, INC. |
发明人 |
CUNNINGHAM SHAWN JAY |
分类号 |
B81B3/00;B81B7/00;H01H1/04;H01H1/50;H01H59/00;H01H61/04;H01L21/302;H01L23/373;H01L23/522;H01L27/12;H01L29/86;H02N1/00;H02N10/00;(IPC1-7):H01H37/52;H02N2/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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