| 摘要 |
Microbattery comprises a solid electrolyte (4) between a first electrode (5) and a second electrode (3), each in the form of a thin layer, where the first electrode and the electrolyte comprise a material with a tetrahedral structure in which a central atom of phosphorus, boron, silicon, sulfur, molybdenum, vanadium or germanium is bonded to four atoms of sulfur, oxygen, fluorine and/or chlorine. Microbattery comprises a solid electrolyte (4) between a first electrode (5) and a second electrode (3), each in the form of a thin layer, where the first electrode and the electrolyte comprise a material with a tetrahedral XY 1Y 2Y 3Y 4structure. X : P, B, Si, S, Mo, V or Ge; Y 1-Y 4S, O, F or Cl. An independent claim is also included for producing a microbattery as above by successively depositing thin layers on a substrate (Ia) using a sputtering target comprising a compound of type A x2T' y2[XY 1Y 2Y 3Y 4] z2B' w2and an element E' to form the second electrode, a sputtering target comprising the group [XY 1Y 2Y 3Y 4] to form the electrolyte and a sputtering target comprising a compound of type A x1T y1[XY 1Y 2Y 3Y 4] z1B w1and an element E to form the first electrode. A : alkali metal; T, T' : Ti, V, Cr, Co, Ni, Mn, Fe, Cu, Nb, Mo and/or W; B, B' : S, O, F or Cl; x1, w1, x2, w2 : 0 or more; y1, z1, y2, z2 : numbers greater than 0; E, E' : metals or carbon. |
