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发明名称
Method of forming a metal line in semiconductor device
摘要
申请公布号
KR100483600(B1)
申请公布日期
2005.04.15
申请号
KR20020042144
申请日期
2002.07.18
申请人
发明人
分类号
H01L21/3205;(IPC1-7):H01L21/320
主分类号
H01L21/3205
代理机构
代理人
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