TRÄGER MIT INTEGRIERTER ABSCHEIDUNG VON GASABSORBIERENDEM MATERIAL ZUR HERSTELLUNG VON MIKROELEKTRONISCHEN, MICROOPTOELEKTRONISCHEN ODER MIKROMECHANISCHEN BAUELEMENTEN

摘要

The specification teaches a device for use in the manufacturing of microelectronic, microoptoelectronic or micromechanical devices (microdevices) in which a contaminant absorption layer improves the life and operation of the microdevice. In a preferred embodiment the invention includes a mechanical supporting base, and a layer of a gas absorbing or purifier material is deposited on the base by a variety of techniques and a layer for temporary protection of the purification material is placed on top of the purification material. The temporary protection material is compatible for use in the microdevice and can be removed during the manufacture of the microdevice.