WASHING METHOD AND WASHING SYSTEM OF OPTICAL COMPONENT, AND HOLDING TOOL OF OPTICAL COMPONENT

摘要

PROBLEM TO BE SOLVED: To provide a washing method and a washing system of optical component capable of washing, e.g., even magnetized optics like crystal for a Faraday rotating piece, and an optical component holding tool usable for it. SOLUTION: Ultrasonic washing and spin drying of the optical component easy to chip like a magnetized garnet wafer can be performed by using the holding tool of optical component arranged so that a magnet containing neodymium, iron and boron as components is opposite to an optical face of the garnet wafer. COPYRIGHT: (C)2005,JPO&NCIPI