申请人 |
TOKYO ELECTRON LIMITED;INTERNATIONAL BUSINESS MACHINES CORPORATION;YAMASAKI, HIDEAKI;MATSUDA, TSUKASA;GOMI, ATSUSHI;HATANO, TATSUO;TACHIBANA, MITSUHIRO;MATSUZAVA, KOUMEI;KAWANO, YUMIKO;LEUSINK, GERT, J.;MCFEELY, FENTON, R.;MALHOTRA, SANDRA, G.;SIMON, ANDREW, H.;YURKAS, JOHN, J. |
发明人 |
YAMASAKI, HIDEAKI;MATSUDA, TSUKASA;GOMI, ATSUSHI;HATANO, TATSUO;TACHIBANA, MITSUHIRO;MATSUZAVA, KOUMEI;KAWANO, YUMIKO;LEUSINK, GERT, J.;MCFEELY, FENTON, R.;MALHOTRA, SANDRA, G.;SIMON, ANDREW, H.;YURKAS, JOHN, J. |