| 摘要 |
PROBLEM TO BE SOLVED: To improve the degree of freedom in layout, and to improve throughput and reduce costs in a substrate treating device for connecting the automatic inspection apparatus of a substrate. SOLUTION: The substrate treating device is mechanically divided into each processing block of an indexer block 1, a bake block 2, a resist coating block 3, a development processing block 4, an interface block 5, and an inspection block IB. Each processing block has conveyance robots (TR1-TR5) and substrate placement sections (PASS1-PASS8) as substrate conveyance means, respectively. The substrate placement sections PASS1-PASS8 are all in the same structure, and the conveyance robot of each processing block can access the substrate placement section of an adjacently connected block. COPYRIGHT: (C)2005,JPO&NCIPI
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