| 摘要 |
PROBLEM TO BE SOLVED: To provide a blast mask for accurately working a recessed part formed on a working surface, a working method using it and a wafer supporting member, since the blast mask does not peel during blast working. SOLUTION: The blast mask made of two layers of a layer including a cellulose derivative on one sheet-like main surface and a layer including an ester compound on the other main surface is used. COPYRIGHT: (C)2005,JPO&NCIPI
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