发明名称 Halbleitervorrichtung aus einer galliumnitridartigen III-V-Halbleiterverbindung und Verfahren zu ihrer Herstellung
摘要 A gallium nitride-based III-V Group compound semiconductor device (10) has a gallium nitride-based III-V Group compound semiconductor layer (13) provided over a substrate (11), and an ohmic electrode (15) provided in contact with the semiconductor layer (13). The ohmic electrode (15) is formed of a metallic material, and has been annealed. <IMAGE>
申请公布号 DE69425186(T3) 申请公布日期 2005.04.14
申请号 DE1994625186T 申请日期 1994.04.27
申请人 NICHIA CORP., ANAN 发明人 NAKAMURA, SHUJI;YAMADA, TAKAO;SENOH, MASAYUKI;BANDO, KANJI;YAMADA, MOTOKAZU
分类号 H01L21/00;H01L21/285;H01L29/20;H01L29/72;H01L33/00;H01L33/32;H01L33/38;H01L33/40;H01L33/42;H01L33/44;H01S5/00;H01S5/042;H01S5/323 主分类号 H01L21/00
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