发明名称 METHOD OF FORMING BUMP ELECTRODE
摘要 <P>PROBLEM TO BE SOLVED: To make the heights of hard bump electrodes formed on a circuit board by plating etc., equal to each other by a simple method without exposing metallic films in the electrodes and may cause defective mechanical junction with semiconductor elements when the films are exposed, nor producing cracks which may cause defective electrical connection with the semiconductor elements in the surfaces of the bump electrodes. <P>SOLUTION: After metallic layers 2 and 5 which become the base layers of the bump electrodes 13 are formed on the surface of the circuit board 1, the heights of the metallic layers 2 and 5 are made equal to each other by pressing a flattening jig 7 against the layers 2 and 5. Then the bump electrodes 13 are formed by laminating metallic films 12 upon the surfaces of the metallic layers 2 and 5. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005101068(A) 申请公布日期 2005.04.14
申请号 JP20030330004 申请日期 2003.09.22
申请人 SHARP CORP 发明人 SAKOTA NAOKI;KITAOKA KOKI
分类号 H01L21/60 主分类号 H01L21/60
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