| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an oscillatory type angular velocity sensor capable of correcting an output temperature by driving period control of an oscillator, capable of controlling precisely frequency conversion for a temperature detection input, and capable of facilitating control following a temperature of frequency off-set. <P>SOLUTION: A driving pulse signal generation part 20 of this oscillation type angular velocity sensor 1 has a delay circuit 10 comprising a plurality of inversion circuit groups connected in series. A driving pulse signal having a temperature-corrected proper period Din is generated using as a unit a phase difference ϕ of reference pulse signals output in order from a plurality of inversion circuits constituting the delay circuit 10. The sensor 1 has also a reference pulse signal generation part 53 for generating the reference pulse signal, a reference pulse period computing part encodes a period of the reference pulse signal, using the delay circuit 10 used in common with the driving pulse signal generation part 20, using as the unit the phase difference ϕ of reference pulse signals output in order from the plurality of inversion circuits constituting the delay circuit 10. A period control data computing part 51 computes the proper period Din, using a period Dt of the reference pulse signal encoded using the phase difference ϕ as the unit. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
