摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ion detector with satisfactory measurement accuracy by excluding the effect of interfering ions. <P>SOLUTION: In this ion detector, a liquid channel 30 is formed by joining a tabular lid part 20 onto a surface with a groove part 40 for liquid channel serving as a liquid channel pattern on a semiconductor substrate 10, and the ion concentration of a medium solution flowing into the liquid channel 30 is detected by an ion sensor 4, comprising an ion-selective field effect transistor 2 and a reference electrode 3. The liquid channel comprises a main channel 31 and at least one sub-channel 32 branching off from the main channel 31, and has an electrode part 1 for separation to separate the medium solution into specific kinds of ions, by impressing a voltage on the medium solution flowing through the main channel 31. The ion sensor 4, used for detecting the specific kinds of ions, into which the medium solution is separated, is disposed in the liquid channel after the branching off. <P>COPYRIGHT: (C)2005,JPO&NCIPI |