| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of specifying a hand to be used for conveying a substrate to a specified part such as a processing chamber by a user. SOLUTION: A process recipe is stored in a recipe storage 5, to which reference is made by a control unit 4 when conducting the operation control of a transfer robot TR and a center robot CR. The process recipe defines, together with the procedure of conveying a wafer W, which hands UH, LH of the transfer robot TR are used for deriving and accommodating the wafer W with respect to a cassette C, and defines which hands UH, LH of the center robot CR are used for conveying in and out the wafer W with respect to each processing chamber through which the wafer W passes. It is possible to input contents specified in the process recipe from a recipe input 6 including a keyboard or the like by starting a recipe editor program. COPYRIGHT: (C)2005,JPO&NCIPI
|
