| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that temperature is variable and required soaking properties and temperature responsibility are not obtained regarding a ceramic heater used when a wafer is heated mainly. SOLUTION: In the ceramic heater having a plurality of resistance heating elements on one main surface of a tabular ceramic body and having a wafer heating surface on the other main surface, the ceramic heater has a feeding terminal supplying the heating elements with a power, a metallic case connected to the tabular ceramic body so as to wrap the feeding terminal, and a contact member supporting the peripheral section of the ceramic body in the shape of a ring and being connected to the metallic case. In the ceramic heater, the heater has a non-heat-generating region in which there is no resistance heating element on the outside of the circumcircle of the heating element in the periphery of the ceramic body. In the ceramic heater, the width of the non-heat-generating region is made larger than the opposed space of the heating element on an outer periphery. COPYRIGHT: (C)2005,JPO&NCIPI
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