| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for seal material drawing that can precisely perform drawing even when viscosity is high. SOLUTION: A nozzle where a seal material is reserved and a substrate to be coated with the seal material are relatively moved to perform drawing on the substrate in specified pattern from the nozzle. When the seal material begins to be discharged from the nozzle, the interval between the nozzle and substrate is made smaller than a drawing set interval. The interval is increased after the drawing is started, and the drawing set interval is maintained after the interval reaches the drawing set interval to perform the drawing. Further, redrawing is carried out in the area from the drawing start point to where the drawing set interval is reached. COPYRIGHT: (C)2005,JPO&NCIPI
|
