A vacuum pump comprises a molecular drag pumping mechanism and a regenerative pumping mechanism. A rotor element of the molecular drag pumping mechanism surrounds rotor elements of the regenerative pumping mechanism.
申请公布号
WO2005033520(A1)
申请公布日期
2005.04.14
申请号
WO2004GB04110
申请日期
2004.09.23
申请人
THE BOC GROUP PLC;STONES, IAN, DAVID;SCHOFIELD, NIGEL, PAUL;STUART, MARTIN, NICHOLAS
发明人
STONES, IAN, DAVID;SCHOFIELD, NIGEL, PAUL;STUART, MARTIN, NICHOLAS
