A vertical semiconductor device having a super-junction structure where N-type column regions and P-type column regions are alternated. A column region termination section is disposed in a position spaced by a distance such that the distance between the termination of an active region and the termination portion of a column region is shorter than the distance equal to the depth of the column region from the active region termination portion by the length which is a half of the width of the N-type column regions. Thus, the electric field concentration on a specific portion in the region facing the short side of the column structure is prevented, and the breakdown voltage of the vertical semiconductor device is improved.
