| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular speed sensor for fixing a support substrate to a housing, by utilizing a non-oscillating part generated in the periphery of the support substrate on which a tuning fork oscillator is mounted. <P>SOLUTION: The angular speed sensor 1 is provided with the tuning-fork oscillator 2, having a foot 5 whose end is a base end, a support substrate 3 on which the tuning-fork oscillator 2 is implemented in the condition that main faces of the tuning-fork oscillator 2 face each other and the foot 5 is oscillated via the base end, and the housing 4 for accommodating the tuning-fork oscillator 2. The support substrate 3 has a first opening slit 10 opened near the center of one of two end faces orthogonal to the longitudinal direction of the foot 5 of the tuning-fork oscillator 2, formed in the longitudinal direction of the foot 5 and segmenting the support substrate 3 into substrate parts 11 corresponding to each foot 5. Each substrate part 11 is fixed to the housing 4 via the non-oscillating parts S of two end faces in the longitudinal direction of the foot 5. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
