| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray CT device capable of imaging clearly the bonding state between a solder ball and a wiring pattern, a crack in an article wherein a plurality of materials having different X-ray absorptivities are intermingled. SOLUTION: Data related to spatial fluctuation of the X-ray absorptivity of each portion of a sample, for example, a differential value between the densities of pixels, are calculated from fetched X-ray transmission data, while rotating the sample W, and a reconfiguration operation of a tomogram is performed by using the spatial fluctuation data. Hereby, a tomogram where a portion having a large spatial change of the X-ray absorptivity inside the sample is emphasized is acquired, and a fine crack between the solder ball and the wiring pattern on a substrate or the like can be imaged clearly. COPYRIGHT: (C)2005,JPO&NCIPI
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