| 摘要 |
PROBLEM TO BE SOLVED: To highly accurately carry a minute amount of liquid in forward and backward directions, with simple structure. SOLUTION: A micropump 100 comprises: a first channel 115 changeable in channel resistance depending on differential pressure; a second channel 117 having a smaller change rate of the channel resistance with respect to change in differential pressure than that of the first channel 115; a pressure chamber 109 connected with the first channel 115 and the second channel 117; and a piezoelectric element 107 for changing pressure inside the pressure chamber 109. The piezoelectric element 107 changes the pressure inside the pressure chamber 109 so as to make a difference in ratios between the channel resistance of the first channel 115 and that of the second channel 117. COPYRIGHT: (C)2005,JPO&NCIPI
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