MICROREACTOR

摘要

A microreactor has flow paths consisting of microchannels, a reactor connected to the flow paths, inlet openings for sending a sample to and receiving a sample from the flow paths or the reactor that is connected to the flow paths, a first base plate having outlet openings for recovering the sample after reaction, and a second base plate where at least one or more micropumps are formed so as to correspond to the inlet openings and/or outlet openings. Each micropump has a base body having in its inner surface a cavity made from ceramic, an electrode and piezoelectric/electrostriction layer formed on the outer surface of the base body, and at least two or more connection openings. The first and the second base plate are adhered to each other and integrally formed.