| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a corrosion resistant glass member which is high in corrosion resistance, less in generation of particles, and easily manufactured, and contains nitrogen, and a method for manufacturing the same. <P>SOLUTION: A corrosion resistance member formed of glass consisting of Si, Al, O, N and elements of group 3a and/or group 2a, and a member with a corrosion resistant thermal spraying film of glass consisting of the composition are high in corrosion resistance and heat-resistant strength against corrosive gas and plasma, less in generation of particles. The corrosion resistant member of glass can be manufactured by mixing, molding, heat-treating silicon nitride, alumina, silica and oxides of elements of group 3a and/or group 2a, or performing thermal spraying on a base material. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
