摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a cathode side device of carbon nanotube field emission display, and to provide a method for manufacturing the cathode side device. <P>SOLUTION: The cathode side device of a carbon nanotube field emission display is manufactured by providing a substrate (a), forming a cathode layer having a first pattern on the substrate (b), forming an opaque dielectric layer having a second pattern on the substrate and exposing a partial cathode layer between the gaps of the second pattern (c), forming a gate layer having the same pattern as the second pattern on the opaque dielectric layer (d), applying a carbon nanotube material to the entire area of the upper surface of the cathode layer and the gate layer exposed between the second patterns (e), and exposing the carbon nanotube material from the backside of the substrate (f). <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |