| 摘要 |
PROBLEM TO BE SOLVED: To reduce the space and the costs required for inspecting a substrate, especially a semiconductor wafer, during a production process. SOLUTION: The apparatus has inspection machines including a means for holding a probe board that includes, at least, a chuck, a chuck drive, an electronics control device, a probe or handling system 3, a substrate magazine station 7, and an alignment station 10. The apparatus has at least two inspection machines 1, 2, which are all jointly operatively connected to the handling system, the substrate magazine station, and the alignment station. COPYRIGHT: (C)2005,JPO&NCIPI
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