| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for analyzing the structure of a material which uses CBED of TEM for analyzing structural information, such as stress distribution of a sample. SOLUTION: The method for analyzing the structure of the material using CBED of TEM forms a convergent electron beam on a part of a sample, obtains a disc convergent beam electron diffraction pattern, and the method includes (a) a step of detecting an experimental HOLZ line from the convergent beam electron diffraction pattern, (b) a step of considering the detected experimental HOLZ line as a model and detecting the theoretical HOLZ line as a TEM experimental condition and the lattice constant of the material are changed, and (c) a step of comparing the theoretical HOLZ line and the experimental HOLZ line and determining the lattice constant of the material. COPYRIGHT: (C)2005,JPO&NCIPI
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