SOLUTION FEEDING DEVICE AND INSPECTION METHOD FOR SOLUTION FEEDING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a solution feeding device capable of simply and certainly carrying out inspection of success in or failure of a piezoelectric element. SOLUTION: The device is provided with a head provided with a plurality of nozzles; a plurality of piezoelectric elements 8 provided oppositely to the respective nozzles of the head 1; a pulse generator 10 in which setting of pulse width of a pulse voltage is possible and a liquid drop-like solution is injected from the nozzle by applying the pulse voltage of a first pulse width to the piezoelectric element; a peak hold circuit 26 for detecting a peak value of the pulse voltage applied to the respective piezoelectric elements when the pulse width of the pulse voltage is set to a second pulse width smaller than the first pulse width by the pulse generator and is applied to the piezoelectric element; a determination part 28 for determining the success in or failure of the condition of the piezoelectric element by the peak value of the pulse voltage detected by the peak hold circuit 26. COPYRIGHT: (C)2005,JPO&NCIPI