| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an elastomer valve structure capable of being thinned, being operated with small force and being comparatively easily manufactured as compared with a silicon substrate process, and a pumping system using the structure. <P>SOLUTION: A second flow channel 32 laminated by being made orthogonal to a first flow channel 30 is formed within an elastomer block. A film 25 for forming a top part of the first flow channel 30 separates two flow channels, is a top part of the first flow channel 30, and at the same time, forms a bottom part of the second flow channel 32. By fluctuating pressure of the second flow channel 32, the film 25 repeats bending and recovering to a lower side, and thereby the first flow channel 30 constitutes a valve operation system of a linear operation. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
