摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric device which can enhance the oscillation characteristics of its oscillating section. <P>SOLUTION: This piezoelectric device is provided with a base, wherein its cavity 43 is opened to its 1st face side, a 1st electrode layer 46 formed on the 2nd face side of the base, a piezoelectric layer 47 laminated on the 1st electrode layer 46, an auxiliary electrode layer 48 located between the 2nd face and the piezoelectric layer 47 to support the piezoelectric layer 47, and a 2nd electrode layer 49 laminated on the piezoelectric layer 47, while being connected with the auxiliary electrode layer 48. Those 1st electrode layer 46, 2nd electrode layer 49 and auxiliary electrode layer 48, located on the area associated with the cavity 43, are formed of nearly symmetric shape as a whole so that it has two symmetric axes O1 and O2 which pass through the center on the body 47a of the piezoelectric layer 47. The cavity 43 is formed into a symmetric shape having these two symmetric axes. <P>COPYRIGHT: (C)2005,JPO&NCIPI |