| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a placement table which is excellent in soaking properties, not warped, and composed of a ceramic base and a cooling member which are bonded well together. <P>SOLUTION: The ceramic base and a composite material of aluminum and ceramic are bonded together interposing a bonding layer containing an aluminum alloy layer of 50 to 200 μm thickness between them. When a bonding operation is carried out, a pressure is applied to the bonding surface in a nearly vertical direction while the ceramic base and the composite material are heated up to a temperature range from the temperature Ts-30°C to the solidus temperature Ts of the aluminum alloy layer. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
