| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin helical inductor using the highly reliable winding coil of a coil conductor, a method for manufacturing the same, and a substrate provided with a built-in helical inductor. SOLUTION: The manufacturing method is provided for manufacture of a helical inductor which is characterized in including a belt type magnetic thin film layer formed of a single column or a plurality of columns divided in the horizontal direction, forming a single layer magnetic material in which a magnetic thin film 4 is held by insulators 3 or a laminated magnetic material in which the insulator 3 and magnetic thin film 4 are alternately laminated, and winding the coil wire for several turns around the laminated magnetic material. COPYRIGHT: (C)2005,JPO&NCIPI
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