| 摘要 |
PROBLEM TO BE SOLVED: To provide a color solid-state image sensing element which can be manufactured at a low cost without deteriorating its light receiving part in sensitivity and resolution. SOLUTION: The solid-state image sensing element is equipped with a plurality of light receiving parts provided on a semiconductor substrate or the surface of the semiconductor substrate, and an insulating layer which includes an interconnect line inside and an optical waveguide provided on the light receiving parts; and the optical waveguide is formed of a columnar crystal structure. A micro lens is arranged over the optical waveguide formed of the columnar crystal structure. The main material of the optical waveguide is cesium iodide (CsI). The optical waveguide has a color filter function, a columnar crystal structure, is formed of a color filter whose main material is cesium iodide, and formed through a deposition method where CsI and pigment (crystal and molecular material) are used as a deposition source. COPYRIGHT: (C)2005,JPO&NCIPI
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