| 摘要 |
PROBLEM TO BE SOLVED: To provide a purging air-flow channel structure which efficiently collects or separates dust in purging air. SOLUTION: The structure includes an air flow channel 13 allowing the purging air 9 to circulate. A separation section 8, which performs inertial separation of the dust 10 in the purging air 9 and a filter section 11, which collects the dust 10 in the purging air 9 are provided in the air flow channel 13. The filter section 11 is provided upstream of the separation section 8 in the air flow channel 13. The filter section 11 is provided with at least two shielding sections 11a, 11b, having a plurality of passage holes in the width direction which allow the purging air 9 to pass through. Each shielding section is sequentially arranged at a predetermined spacing apart from each other from the upstream to the downstream of the air flow channel 13. The wall of each shielding section facing upstream is provided at a position, against which the purging air 9, passing through the passage holes of the shielding section neighboring in the upstream collides. COPYRIGHT: (C)2005,JPO&NCIPI
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