| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray analyzer equipped with an atmosphere replacement function capable of enhancing reproducibility when taking out and putting a sample in under a He atmosphere, at a low cost. SOLUTION: Since an inside of a preliminarily exhaust chamber C4 is preliminarily replaced with the He atmosphere not only before carrying the sample S in from the preliminarily exhaust chamber C4 into a main chamber C1 but also before carrying the sample S out from the main chamber C1 to the exhaust chamber C4, severe air-tightness for the exhaust chamber C4 is not required and structure is prevented from being complicated, so as to allow cost reduction, because air is precluded therein from being mixed into the main chamber C1 when carrying the sample S out from the main chamber C1 to the exhaust chamber C4, different from that in the prior art. An amount of He consumption is not increased to allow the cost reduction, because the He gas is not required to flow in the exhaust chamber C4 all the time under an operation of the analyzer. COPYRIGHT: (C)2005,JPO&NCIPI
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