| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid separation filter having a chemical stability for moisture and, therefore, an excellent water resistant property with regard to separation performance. SOLUTION: The fluid separation filter is formed by coating the surface of a porous supporting body with a fluid separation film containing Si-C-O bonds. Further, the fluid separation filter is formed by coating the surface of a porous supporting body with a fluid separation film containing Si-C-O bonds and, moreover, the thickness of the fluid separation filter is preferably 0.05μm to 1μm. COPYRIGHT: (C)2005,JPO&NCIPI
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