| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical diffusing system capable of simply carrying out change of a chemical. SOLUTION: In the chemical-diffusing system 1, chemical cartridges 3A to 3C are adopted as a chemical feed source for a chemical-diffusing device 2 and a control parameter containing an optimal chemical diffusing condition p3 is memorized in cartridge side memorizing parts 22A to 22C of each of chemical cartridges 3A to 3C. When chemical cartridges 3A to 3C are mounted on the chemical-diffusing device 2, a control part 10 reads out memory content of the cartridge side memorizing parts 22A to 22C and carries out diffusing motion of the chemical so as to coincide with optimal diffusing conditions. The change of the chemical can simply be made possible by only replacing each of chemical cartridges 3A to 3C. COPYRIGHT: (C)2005,JPO&NCIPI
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