| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a glass ceramic wiring substrate with built-in capacitor which suppresses mutual diffusion among a dielectric layer, a glass ceramic laminate and an electrode layer to prevent the deterioration of capacity of the capacitor formed in the glass ceramic wiring substrate and suppress the variation of the same. <P>SOLUTION: In the glass ceramic wiring substrate with built-in capacitor, the capacitor consisting of a pair of electrode layers 2 arranged so as to be opposed while pinching the dielectric layer 3 consisting of barium titanate is accommodated in an insulating substrate consisting of glass ceramics, and, in this case, the electrode layer 2 is constituted of the sintered body of spherical Cu powder having the summation 50% grain size of 0.8-1.2μm and the summation 10% grain size of not less than 0.5μm. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
