| 摘要 |
PROBLEM TO BE SOLVED: To obtain a carrier detecting stopping positional shift of a holding unit, and substrate processing equipment comprising the carrier. SOLUTION: At the time of shipping substrate processing equipment, a Z-axis drive section 89 moves an arm unit 10e continuously along a Z-axis section 10f at a relatively low speed. When a CPU 81 detects arrival of the arm unit 10e at a position where a cut 62b is made based on an output signal from a transmission sensor 50, the CPU 81 acquires a first value of an encoder 90 at that moment in time. At the time of maintenance after operation of the substrate processing equipment, a second value of the encoder is acquired by performing similar measurement. Thereafter, the first and second values are read out from a storage section 82 and compared and if both values do not coincide, a decision is made that the absolute stop position of the arm unit 10e is shifted. COPYRIGHT: (C)2005,JPO&NCIPI |
