| 摘要 |
PROBLEM TO BE SOLVED: To provide a variable wavelength filter which needs no release hole, with which stable driving of a movable part is implemented, and with which the structure and manufacturing process are made simple, and which is small-sized, and also to provide a method for manufacturing the same. SOLUTION: The variable wavelength filter is equipped with: a first substrate 3 that has light transmissivity and a movable part 31; a second substrate 20 that has light transmissivity and that is placed opposite to the first substrate 3; a first and a second gap 21, 22 that are provided between the movable part 31 and the second substrate 20; an interference section that causes interference via the second gap 22 between the movable part 31 and the second substrate 20; and a driving section that, using the first gap 21, displaces the movable part 31 with respect to the second substrate 20 and that thereby changes the interval of the second gap 22. COPYRIGHT: (C)2005,JPO&NCIPI
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