| 摘要 |
PROBLEM TO BE SOLVED: To perform a high-accuracy measurements which takes into consideration lens aberrations and properties of pixel of an imaging element or the like, at the measurement of a displacement amount of a surface, when deformations occurs due to external force and the temperature change or the like, in a common structure such as a heater block or the like, using digital image correlation method. SOLUTION: The surface displacement amount for a measuring object 1 is obtained as follows; a CCD camera 2 images the measuring object 1, by moving one by one with a predetermined moving amount corresponding toα<SB>0</SB>(α<SB>0</SB>: a decimal value smaller than 1) pixel of an image; a calibration curve is formed from a relation between the pixel moving amount on each image and the predetermined moving amount of the measuring object 1 by comparison with each image, respectively; images, before and after the deformation of the measuring object 1, are photographed with the CCD camera 2, respectively; moving amount N<SB>1</SB>+α<SB>1</SB>(N<SB>1</SB>: an integer,α<SB>1</SB>: a decimal value smaller than 1) of the pixel on the images, before and after the deformation is calculated, by comparing with the images before and after the deformation; and the surface displacement amount of the measuring object 1 is calculated from the calculated moving amount of the pixel by using the calibration curve. COPYRIGHT: (C)2005,JPO&NCIPI
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