| 摘要 |
PROBLEM TO BE SOLVED: To provide an identification method and an identification apparatus for especially allowing a detected foreign matters, to identify whether an inspection target is one adhering to the surface, regarding the apparatus for inspecting foreign matters formed on the surface of or in the inside of the inspection target. SOLUTION: The identification apparatus acquires image information (focal point image information), in which the upper surface of the inspection target is focused from an imaging device; and image information (non-focal image information), in which the focal point is shifted from the surface to the lower surface and at a position for enabling an internal foreign matter to be recognized, thus identifying the surface foreign matters and internal foreign matters, based on the focal point image information and non-focal point image information. COPYRIGHT: (C)2005,JPO&NCIPI
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