| 摘要 |
PROBLEM TO BE SOLVED: To enhance detection sensitivity for a physical quantity without enlarging the size of the whole sensor. SOLUTION: In each beam part 4, the first portion 4a in parallel to an x-axis (or y-axis) astride an opening part 3a in the central part of a chamber part 3 and a groove 3b, and the second portion 4b in parallel to one side of a fixing part 8 within the opening part 3a, i.e. the y-axis (or x-axis), and the third portion 4c in parallel to the y-axis (or x-axis) are formed to make lengths of the first portion 4a, the second portion 4b and the third portion 4c substantially same. A space for arranging a movable electrode 5 is allowed thereby between the two adjacent beam parts 4, a length dimension of the beam part 4 is extended without enlarging the size of the whole sensor to enlarge a displacement of the chamber part 3, and the detection sensitivity for the physical quantity (acceleration) is enhanced thereby. COPYRIGHT: (C)2005,JPO&NCIPI
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