摘要 |
PROBLEM TO BE SOLVED: To provide a technique which improves a production yield and covers a conductive substrate with an active reagent solution or suspension using a pad printing technique. SOLUTION: It is disclosed that the conductive substrate is covered with the reagent solution or suspension containing metal using a variety of pad printing technique. Thereby, a pseudo-capacitive oxide film, nitride film, carbon nitride film, or carbide film, which have an acceptable surface area applicable to build in an electrolytic capacitor, such as a capacitor having a tantalum anode, can be obtained. Additionally, a uniformity in film thickness, better adhesion, and long-term performance holding, when being stored in an accelerated life test at a high temperature, are ensured. COPYRIGHT: (C)2005,JPO&NCIPI |