摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device in which a low impedance characteristic required for a decoupling circuit can be ensured at frequencies up to several hundred MHz, or up to several tens of GHz or more. SOLUTION: In a semiconductor circuit in which a power source wiring 5 and a ground wiring 3 are arranged so as to be opposed to each other, relating to a part of each opposed wirings 3, 5, the ground wiring 3 has protrusions which form a comb shape viewing from a vertical face in the direction of transmission and extend in the direction of transmission, and the power source wiring 5 also has protrusions which form a comb shape viewing from the vertical face in the direction of transmission and extend in the direction of transmission. Both are combined with each other through an insulating film 4 having the same thickness. COPYRIGHT: (C)2005,JPO&NCIPI
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